Fengxia Liang, Yi Lin, Zhengfei He, Wei Chen, Yudong Zhu, Tian Chen, Lin Liang, Suman Ma, Yinghui Wu, Bao Tu, Dong Wang, Zhixiang Zhang, Linbao Luo, * Zhubing He*

Abstract: In this paper, Among various kinds of attempts to substitute indium-tin-oxide (ITO) in rigid or flexible solar cells, oxide-metal-oxide (OMO) is one of the most promising materials. In this work, by means of reactive plasma deposition tool, a new combination of OMO structures, WO3/Ag/SnO2 (WAS), was deposited at one pot and optimized in each film thickness to obtain high transmittance from 350 nm to 850 nm in wavelength and low sheet resistance, as well as mechanical robustness. Whereas, the typical perovskite solar cells (PSCs) basing on the bare WAS composite film show poor device performance. Hence, aqueous soluble SnO2 nanoparticles was applied to modulate the band level mismatch at the interface between the WAS and MAPbI3 layers and the champion device with 14% in conversion efficiency was achieved, which is the highest value reported hitherto with OMO structures as the transparent conductive electrodes in PSCs. The results from multi-characterizations verify the interface engineering effect by the SnO2 nanoparticles. The unencapsulated WAS based device stability also shows comparable to that of the ITO based in a continuous light soaking in ambient atmosphere (37%RH and 60 oC). This work reveals us a great potential of OMO in place of ITO in solar cells while it still needs more and more attention and efforts in the series of developments.